thin film and structured surfaces workshop presentations
O1.1 – Measurement of Thin Film Thickness and other Parameters: Nanometrology Status & Future Needs within Europe
Dr. A. Pidduck
QinetiQ, UK
O1.2 – Thin Film Analysis using X-Ray Reflectometry & Spectroscopic Ellipsometry
Dr. J-L. Stehle
Dr. J-L. Stehle
Sopralab, FR
O1.3 – Chemical Analysis of Surfaces and Thin Films using Ion Beam Techniques
Dr. E. Niehus1, Dr B. Hagenhoff2
Dr. E. Niehus1, Dr B. Hagenhoff2
1IONTOF GmbH, DE & TASCON GmbH, DE
O1.4 - Achievements and Challenges in Metrology in Surface and Thin Film Analysis
Dr. W. Unger
Dr. W. Unger
BAM, DE