critical dimensions and scanning probe techniques action group

Coverage

When dimensions get smaller, hitherto minute and neglectable features become critical for the functionality of components and devices. Also features that appear harmless for mechanical behaviour may be critical for electronic or biological behaviour, which is important when the same "nano device" is used for different purposes; this is, for instance, the case for nanotubes. Therefore a new framework for the concept of critical dimensions will have to be developed.

This Action Group will ensure effective and well organised pan European nanometrology in the area of critical dimension and scanning electron/probe techniques.

Issues to be addressed

• Critical Dimensions- measurements and limits.
• Scanning electron/probe microscopy used for other tasks in dimensional nanometrology.
• Transfer of critical dimension measurements to other applications (for example: nanoparticles, length of nanotubes).
• Calibration of instruments, guidelines, written and artificial standards, traceability and uncertainty.
• Modelling and simulation, in particular to take into account the interaction between probes and surfaces.